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Vertical Manufacturing Furnace Product List

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4-inch vertical VGF manufacturing furnace "MAT-150VGFHQ"

The PBN crucible and quartz ampoule are reusable! Introducing the movable VGF furnace.

The "MAT-150VGFHQ" is a movable VGF furnace that allows for the growth of crystals with few defects (EPD) due to its operation under an arsenic pressure of 1 atm. It is a vertical VGF manufacturing furnace designed for 4-inch wafers. After growth, the GaAs ingot and PBN crucible can be separated by immersion in liquid. Additionally, the PBN crucible and quartz ampoule can be reused. 【Features】 ■ Easily obtain crystals with few defects (EPD) ■ The GaAs ingot and PBN crucible can be separated by immersion in liquid after growth *For more details, please refer to the PDF materials or feel free to contact us.

  • Industrial Furnace
  • Vertical Manufacturing Furnace

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6-inch vertical VGF manufacturing furnace "MAT-200VGFHQ"

It is a furnace with a movable body that can easily obtain crystals with few defects (EPD).

The "MAT-200VGFHQ" is a VGF manufacturing furnace with a quartz tube-type movable furnace structure. Since it grows under an arsenic pressure of 1 atm, it is possible to obtain crystals with few defects (EPD) easily. The operating temperature is 1200°C, and the maximum temperature is 1300°C. Additionally, the GaAs ingot and PBN crucible can be separated by immersing them in liquid after growth. Furthermore, the PBN crucible and quartz ampoule can be reused. 【Features】 - The GaAs ingot and PBN crucible can be separated by immersing them in liquid after growth. - The PBN crucible and quartz ampoule can be reused. *For more details, please refer to the PDF document or feel free to contact us.

  • Industrial Furnace
  • Vertical Manufacturing Furnace

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